Stress-impedance effects of FeSiB/Cu/FeSiB trilayers with a meander structure

FeSiB/Cu/FeSiB trilayers with a meander structure were fabricated by magnetron sputtering on thin glass substrate, and the stress-impedance（SI） effects were studied in the frequency range of 1-40MHz for different film thicknesses of FeSiB films and Cu layer. Experimental results show that the values of stress-impedance（SI） ratio increase nearly linearly with the deflection of the FeSiB/Cu/FeSiB trilayers at high frequencies, and a large negative SI ratio of-18.3% is obtained at 25MHz with 1mm deflection in the FeSiB/Cu/FeSiB trilayers with a thicker FeSiB film. It′s attractive for the applications in stress sensors.