Optimization of rolling process for super length and high performance molybdenum targets applied on G11 of large size display panels

The length of G11 molybdenum target reaches 3430 mm,there is no mature production technology and technology available in the world and it is difficult to produce that super-long target. Depending on the existing mature technology,Luoyang Sifon Electronic Materials co.,LTD has successfully developed high performance G11 molybdenum sputtering target by improving production craft and technology,and realized industrialization,filling a domestic gap in this field. The products meet an expanding demand in market of China with the development of high-generation display panel production line. This paper focuses on the rolling process improvement of G11 molybdenum target,and the experimental results are investigated.