FU Xiaorong, WU Guangming, SONG Shigeng, SONG Zhitang, GAO Jianxia, LIN Chenglu. SPRAY PYROLYSIS APPROACH FOR PREPARING MgO THIN FILMSJ. Journal of Functional Materials and Devices, 1999, 5(3): 235-239.
Citation: FU Xiaorong, WU Guangming, SONG Shigeng, SONG Zhitang, GAO Jianxia, LIN Chenglu. SPRAY PYROLYSIS APPROACH FOR PREPARING MgO THIN FILMSJ. Journal of Functional Materials and Devices, 1999, 5(3): 235-239.
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SPRAY PYROLYSIS APPROACH FOR PREPARING MgO THIN FILMS

    Abstract
  • oriented MgO thin films have been successfully prepared on Si substrate by a simple spray pyrolysis method started from magnesium acetate. The results indicated that substrate temperature and deposition rate are key factors to grow MgO films and （100）-oriented MgO films which were obtained when the substrate temperature and the flow rate of O2 was 6000C and 2.5L/min, respectively. In addition, the microstructure of the MgO thin films were examined with X-ray diffraction （XRD）, transmission electron microscopy （TEM） and atomic force microscopy （AFM）.
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