XIE Huikai, SUN Xiqing, LIU Litian, LI Zhijian. A Silicon-Based Integrated MicromotorJ. Journal of Functional Materials and Devices, 1996, 2(3): 143-146.
Citation: XIE Huikai, SUN Xiqing, LIU Litian, LI Zhijian. A Silicon-Based Integrated MicromotorJ. Journal of Functional Materials and Devices, 1996, 2(3): 143-146.
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A Silicon-Based Integrated Micromotor

    Abstract
  • A silicon-based integrated micromotor is reported in this paper.The process for this motor is very simple which includes four photolithographies, two LTO film and two LPCVD polysilicon film depositions. Both the rotor and stator are made of a 2.5μm thick polysilicon film. The gap between the stator and rotor is 2.0~2.5μm, and the radius of the rotors are 40~50μm, The measurements show that the minimum drive voltage is 49V and the maximum rotational speed is up to 600 rpm.
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