Research on high performance metal-insulator-metal capacitors for radio frequency integrated circuits applications

With the rapid development of wireless communication techniques,high performance metal-insulator-metal（MIM） capacitors have been paid great attention,and become an inevitable choice of next generation radio frequency integrated circuits.The article summarizes comprehensively the research progresses of the MIM capacitors,including the technical background,the fabrication methods of MIM capacitors,the engineering of the insulators,and electrode materials.Hopefully,this can provide technical guidance for the development of next generation MIM capacitors.