Abstract: In this paper,the stacked inductors were fabricated with three metal layers by the inversion photoresist lift-off process,and the effect of metal deposition method、photoresist selection and drying time were analyzed,finally,the inductors with the minimum metal line width of 4μm,the minimum space of 4μm and the metal thickness of 1μm were fabricated,The devices have good appearance with high production yield observed by the optical microscope and step profiler.