Abstract:
Semiconductor materials are the cornerstone of the IC industry, and localization of semiconductor materials is the key to ensuring the fast and healthy growth for the IC industry in China. And wet chemicals are critical to the semiconductor industry. As a leading domestic wet chemical provider, Sinyang has successfully provided post etch polymer remover SYS9070 for leading semiconductor manufacture company in mass production. This article introduces principles of the manufacturing process, product performance of post etch polymer remover SYS9070, and summarizes the significance of overcoming the technological challenges.