基于APDL的微梳齿谐振器动态空气阻尼分析

APDL Used in Analyzing the Influence of Slide Film Damping on Comb Micro-resonator

  • 摘要: 为分析微梳齿谐振器在空气阻尼下高频振动的动态特性,采用ANSYS参数化设计语言APDL进行编程分析,程序中将微谐振器模型简化成有面积的质量点,对质量点添加条件和约束建立分析模型,用FLUID139单元设置空气层模型,用TRANS126单元设置叉指换能模块,通过此程序求解的真空条件下的共振频率与理论分析结果基本吻合。与现有方法相比,该方法快速、实用、具有更好的适应性。

     

    Abstract: In order to research the dynamic characteristics of a comb micro-resonator vibrates with air resistance,e. g. amplitude,frequency etc. This way makes a program by ANSYS parametric design language APDL. In the program the structure was built as a mass point with area,the air resistance is set by FLUID139 element type,the comb fingers are set by TRANS126 element,and then calculate the model analysis and harmonic response. Comparison between model trial values and theoretical values shows that this method is reasonable. Compared with others,this method is practical,fast and adaptable.

     

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