Abstract:
In order to research the dynamic characteristics of a comb micro-resonator vibrates with air resistance,e. g. amplitude,frequency etc. This way makes a program by ANSYS parametric design language APDL. In the program the structure was built as a mass point with area,the air resistance is set by FLUID139 element type,the comb fingers are set by TRANS126 element,and then calculate the model analysis and harmonic response. Comparison between model trial values and theoretical values shows that this method is reasonable. Compared with others,this method is practical,fast and adaptable.