Abstract: This paper introduces a MEMS device for generating electrical power from mechanical energy of environment vibration.The design utilizes a single crystal silicon beam covered with sol-gel PZT film.Its operation principal is based on the direct piezoelectric effect of PZT material.The device is fabricated on（110） silicon wafer,on which an optional cuboid silicon mass can be formed beneath the cantilever using simple wet etching process.The proof mass is helpful for the improvement of output electric power and decrease of the natural frequency of the device.Electro-machanical modeling,fabrication processes and measurement of the prototypes are presented.The test results show that the power generation of more than 1 nW at a vibration at 1673 Hz/11 nm has been obtained.