烧结工艺对LTCC低通滤波器与Ag共烧收缩匹配性的影响

Effect of Sintering Process on the Shrinkage Matching of LTCC Low-Pass Filter and Ag Co-firing

  • 摘要: 低温共烧陶瓷(LTCC)技术是制备多层片式射频低通滤波器的关键,但实现异质材料的匹配共烧一直是研究的难题。通过优化升温速率、保温时间、烧结温度,深入分析烧结工艺对共烧收缩匹配性的影响,提出在链式烧结炉中以烧结温度860℃、升温速率3.5℃/min、保温时间45 min制备出的低通滤波器,陶瓷基体与Ag电极共烧匹配良好,插入损耗从1.19降低至0.88, 瓷体强度从15.67 N提高至32.28 N, 1.5倍额定电流冲击后开路率从0.19%降低至0.05%, 极大地提高其电性能、力学性能与可靠性,为后续研究异质材料匹配共烧奠定了基础。

     

    Abstract: Low temperature co-fired ceramics(LTCC) is the key to fabricate multilayer chip RF low-pass filters, but it is always a difficult problem to realize the matching co-firing of heterogeneous materials. By optimizing the heating rate, holding time and sintering temperature, the influence of sintering process on the shrinkage matching of co-firing was deeply analyzed. It was proposed that the low-pass filter prepared in the chain sintering furnace with the sintering temperature of 860 ℃, the heating rate of 3.5 ℃/min and the holding time of 45 min is proposed. The ceramics matrix and Ag electrode are well co-fired, the insertion loss is reduced from 1.19 to 0.88, the porcelain body intensity is increased from 15.67 N to 32.28 N, and the open circuit rate is reduced from 0.19% to 0.05%, which greatly improves their electrical properties, mechanical properties and reliability, and lays a foundation for the follow-up study on the matching co-firing of heterogeneous materials.

     

/

返回文章
返回