Abstract: The micro silicon pressure sensor is widely used,due to its advantages of little volume,light weigh,high precision and low cost.In many fields,the micro silicon pressure sensor has replaced some traditional sensors.Furthermore,it is necessary to fabricate sensor with less volume and higher precision.and to extend the fields of application.In this paper,the design of micro mask was discussed in sensor terms of the improving the characteristic of the micro sensor,and the measurement of micro pressure was tested,and the conclusion is satisfied.