非晶金刚石薄膜的制备及其性能研究

PREPARATION OF AMORPHOUS DIAMOND FILMS AND STUDY ON THEIR PROPERTIES

  • 摘要: 本文利用一种新的等离子体沉积技术—真空磁过滤弧沉积(FAD)制备得到一种无氢的非晶碳膜。EELS分析表明,这种非晶碳膜几乎不含有sp2和sp杂化键,呈现出高度的金刚石特征,以致可以被称为非晶金刚石(a-D)膜。应用紫外透射光谱(UV)、红外反射光谱以及椭偏测量等方法对a-D膜的光学性能进行了测量。利用显微力学探针、X射线双晶衍射、卢瑟福背散射(RBS)技术和EELS分析等多种测量手段对a-D的超显微硬度、应力以及密度等力学和结构特性进行了定量分析。另外,对这种a-D膜的场电子发射性能也进行了研究。

     

    Abstract: Nonhydrogenated amorphous carbon films have been prepared by a new plasma technique, filtered arc deposition (FAD). It was found that the carbon were highly sp3 bonded so that the films were referred to as amorphous diamond (a-D). UV, IR and elliposometry spectra were applied to investigate the optical properties of the formed films. The mechanical properties and structure characteristics of FAD a-D films were studied in detail. In addition, the field emission behavior of the films were also investigated in this work.

     

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