Abstract:
Nonhydrogenated amorphous carbon films have been prepared by a new plasma technique, filtered arc deposition (FAD). It was found that the carbon were highly sp
3 bonded so that the films were referred to as amorphous diamond (a-D). UV, IR and elliposometry spectra were applied to investigate the optical properties of the formed films. The mechanical properties and structure characteristics of FAD a-D films were studied in detail. In addition, the field emission behavior of the films were also investigated in this work.