Abstract: La-Ca-Mn-O （LCMO） thin films were prepared onto ZrO₂, Si and glass substrates by the magnetron sputtering method, and the powder target was used to grow the thin films during the deposition process La-Ca-Mn-O （LCMO） thin films were prepared onto ZrO₂, Si and glass substrates by the magnetron sputtering method, and the powder target was used to grow the thin films during the deposition process. After the deposition, the annealing heat treatment were made for the crystallization of the thin films. Studies of x-ray diffraction showed that the thin films on ZrO₂ and glass substrate were pure LCMO structure, but the thin films on Si substrate contained some MnO₂ phase. It was hard to obtain the good quality of thin films on Si substrate, and the reason was not clearly understood. The higher magnetoresistance of LCMO films on ZrO₂ substrate was obtained with the value of about 13% at the temperature of 150K and the magnetic field of 3500 Gauss.