氧化铟锡(ITO)薄膜的透明吸波特性研究

Transparent microwave absorption properties of ITO films

  • 摘要: 利用直流磁控溅射技术室温下在柔性聚酯薄膜衬底上制备了ITO薄膜,将ITO薄膜与有机玻璃和空白聚酯薄膜等介质材料组合成复合结构,最终得到吸波能力较强的透明吸波体。该吸波体在Ku带(12~18GHz)范围波段衰减低于-10dB,峰值超过-20dB,且在可见光区透光率达到68%。

     

    Abstract: ITO films were prepared by D.C.magnetron sputtering on PET at room temperature,and were combined with polymer and blank PET films.Such structure is transparent and its ability to absorb microwave is very good.The reflectivity of this structure at Ku band(12-18GHz) is lower than-10dB,and the peak is lower than-20dB.The maximum transmittance of the structure is about 68%.

     

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