Abstract: With the magnetron sputtering process,a stretchable micro-crack gold film（SMCG）,composed of a gold film based on the polydimethylsiloxane（PDMS） was obtained. The SMCG can be stretched as high as 35% under uniaxial cyclic tension while maintaining its conductance and also causing no fatigue. The effects of flexible substrate and crack microstructure on the mechanical properties of the SMCG were investigated. The finite element analysis was used to simulate its micro-crack structure to verify the impact of micro-crack structure on the stretchability of the SMCG film.