Abstract:
MFGM(Micro Fluxgate Magnetometer) based on MEMS technologies is the hotspot in the cross field of magnetic measurement and MEMS technology research fields.It acts an important role in aerospace crafts,especially in Nano-/Pico satellites.The theory of fluxgate effect adopted in MFGM is introduced.And the structure characteristics of present MFGMs were analyzed from aspects of the cores,coils and!the global layouts.According to the fluxgate principles and the features of the MFGMs,a tow-axes micro fluxgate magnetometer has been designed.The novel magnetic sensor has the outstanding characteristics,such as symmetrical structure,!close flux path,differential form,and flexible connecting.