微型磁通门式磁敏感器(MEMSMag)

Micro fluxgate magnetometer named MEMSMag

  • 摘要: 基于MEMS技术的微型磁通门式磁敏感器是磁场测量技术和微机电系统(MEMS)技术交叉研究领域的一个热点,在航空航天领域特别是在纳型/皮型卫星技术中有着重要的应用。本文介绍了该类磁敏感器所运用的磁通门效应的原理。从磁芯、线圈和整体结构布局等方面分析了现有的各种微型磁通门式磁敏感器的结构特征。并依据磁通门原理和各种微型磁通门式磁敏感器的结构特点,设计了一种两轴微型磁通门式磁敏感器。这种新型的磁敏感器具有对称结构、闭合磁路、差动形式、柔性连接等显著特点。

     

    Abstract: MFGM(Micro Fluxgate Magnetometer) based on MEMS technologies is the hotspot in the cross field of magnetic measurement and MEMS technology research fields.It acts an important role in aerospace crafts,especially in Nano-/Pico satellites.The theory of fluxgate effect adopted in MFGM is introduced.And the structure characteristics of present MFGMs were analyzed from aspects of the cores,coils and!the global layouts.According to the fluxgate principles and the features of the MFGMs,a tow-axes micro fluxgate magnetometer has been designed.The novel magnetic sensor has the outstanding characteristics,such as symmetrical structure,!close flux path,differential form,and flexible connecting.

     

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