基于量子阱薄膜的纳机电矢量水听器设计
Design of a NEMS vector hydrophone based on thin film of quantum well
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摘要: 根据介观压阻效应原理以及柱体声学理论,提出了一种基于量子阱薄膜的纳机电矢量水听器,期望利用量子阱薄膜材料的高灵敏度压阻效应以及水听器精巧的微结构,提高矢量水听器的灵敏度,实现水听器的低频特性及结构微小型化。首先概括地描述了介观压阻效应原理以及柱体声学理论;完成了水听器的结构设计;采用GaAs基微机械加工工艺完成了水听器的加工并对水听器进行了封装,最后对研制出的水听器的性能指标进行了测试,测试结果表明:纳机电矢量水听器不但体积小、质量轻、结构简单,而且能够获取水下声场的质点振动信息,具有"8字型"的指向性,可进行水下声信号的定位探测。Abstract: According to the Meso-piezoresistance effect and acoustics theory of cylinder,a novel vector hydrophone based on thin film of quantum well is introduced in this paper.It is desirable that the application of thin film of quantum well and ingenious structure of the hydrophone may improve the low-frequency sensitivity of the vector hydrophone as well as its miniaturization.The Meso-piezoresistance effect and acoustics theory of cylinder are briefly described.The design and encapsulation of the hydrophone are completed.The test results are presented at last.The experiment results show that the proposed vector hydrophone can detect the vibrating velocity information of particles in sound field,and possesses directional pattern in form of "8"-shape.Also it has other several advantages such as small volume,light weight as well as low cost and so on.
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