Abstract: This paper provides a detailed process flow for fabricating an easy-to-prepare,inexpensive array of tungsten microelectrodes.Firstly,a MEMS-based glass mold was used to align the tungsten probes which had been coated with a layer of photosensitive polyimide.A combination of double-side photolithography and electrochemical etch was then performed to precisely define the length of probes and the shape of probe tips.Finally a SU-8 holder was fabricated with molding and photolithography to fix the array of tungsten probes.The whole process is simple and fast,which involve a reusable glass mold,so it greatly reduces the time and cost of fabrication of neural probes.Results are discussed on the geometrical,electrical properties and biocompatibility of the tungsten microelectrode array.