Abstract: Au contacts were deposited on p-CdZnTe by different process,including electroless deposition,sputtering deposition and thermal vacuum deposition.The characteristics of the interfacial layers between the Au and p-CdZnTe were investigated by shear-off-test,scanning acoustic microscopy（SAM） test,AES test and Current-voltage test,respectively.The results show that the electroless deposition contact can form better ohmic contact,but it is hard to control the operation,so obvious discontinuities appears in the contact interface which can easily cause the degradation of the contact;the sputtering deposition contact is of higher adhesion strength with poorer ohmic-characteristic;the thermal vacuum deposition can get better interface continuities and form better ohmic contact,but adhesion strength is lower,which can be improved by annealing.