Abstract: Using micro-electromechanical systems（MEMS） processing technology,the dielectrophoresis microchips with interdigital arrays were produced on silicon. The research of enrichment jurkat leukemia cells was carried out. When applied with a sinusoidal AC voltage of 5Vp-p and frequency of700 k Hz,it was found that the enrichment efficiency could reach as high as 96. 43%. On this basis,combing with the principle of dielectrophoresis force,the electric field of dielectrophoresis chip model was simulated by finite element analysis software. The high efficient enrichment phenomenon of leukemia cells was under negative dielectrophoretic force.