Abstract: Carbon nitride films were deposite donto glass substrates coated with indium tin oxide(ITO)by cathode electrodeposition from solution of dicyandiamide in N,N-dim ethylformamide.The results of X-ray photoelectron spectroscop y(XPS) and Fourier transform infrared spec troscopy(FTIR)show that the nitrogen to carbon(N/C)ratio of samples is 0.70or so,nitrogen is mostly bonded with carbon by C-N,C=N.A lot of peaks appeared in Raman spectroscopy support the exis tence of α-C₃N₄ and β-C₃ N₄ mixture in the films.The resistivity of carbon nitride films is 10¹² Ω·cm to 10¹³ Ω·cm.