局域电化学沉积增材制造发展与应用现状

Developments and applications of localized electrochemical deposition additive manufacturing

  • 摘要: 局域电化学沉积(localized electrochemical deposition,LECD)增材制造是一种通过精准控制电沉积区域与剂量,实现微纳尺度金属结构可控成形的关键技术,可突破传统微纳制造在材料与尺寸方面的限制。系统阐述LECD的工作原理:该技术基于金属离子(Mn+)在电场驱动下的还原反应,通过微纳米电极或喷嘴的几何约束与电场调控,实现金属的局部沉积,并以"体素"为基本单元逐层构建三维结构。详细介绍FluidFM(fluidic force microscopy)、SICM(scanning ion conductance microscopy)、MCED(meniscus-confined electrodeposition)和EHD-RP(electrohydrodynamic redox printing)等LECD打印技术的设计特点与性能表现,同时总结了该技术在微电子元件、储能器件和高灵敏传感器等领域的应用潜力,为LECD增材制造技术在精密制造与功能器件领域的未来发展提供了重要的技术支撑。

     

    Abstract: Localized electrochemical deposition (LECD) additive manufacturing represents an essential technology that overcomes the material and dimensional limitations of conventional micro/nano manufacturing through precise control of the electrodeposition region and dosage, enabling controlled fabrication of micro/nano-scale metal structures. This review comprehensively examines the fundamental principles of LECD, which operate through the reduction reaction of metal ions (Mn+) under an applied electric field. Through regulation and confinement of the electrode, localized deposition occurs, facilitating the layer-by-layer construction of three-dimensional structures using "voxels" as fundamental building units. The review examines four primary technical approaches in LECD: FluidFM (fluidic force microscopy), SICM (scanning ion conductance microscopy), MCED (meniscus-confined electrodeposition), and EHD-RP (electrohydrodynamic redox printing), emphasizing their distinctive performance characteristics. Additionally, it presents the demonstrated applications of LECD in fields including microelectronic components, energy storage devices, and high-sensitivity sensors, offering valuable perspectives for its continued advancement in precision manufacturing and functional devices.

     

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