Abstract: CdTe films with 300mm×400mm area were prepared by the technology of close-spaced sumblimation（css） in Ar+O₂ atmosphere.The temperature profile was investigated and the relatively uniform distribution of temperature was obtained by adjusting the distribution of lamps in the deposition system.The structure,surface and other properites were studied by using XRD and SEM.The results indicate that CdTe films with crystal size of about 1μm are compact.XRD shows that the CdTe films have the preferred orientation in（111） direction.Small area CdTe solar cells with the strcuture of CdS/CdTe/ZnTe:Cu made from different parts of large scale CdTe films are similar in cell efficiency.