掺杂比对脉冲激光沉积的ZnO:Al膜性能的影响

EFFECTS OF DOPANT RATIO ON ZnO:Al FILM BY PULSED LASER DEPOSITION

  • 摘要: 用脉冲激光法制备了ZnO:Al透明导电膜。通过对膜的霍尔系数测量及SEM、XRD分析 ,详细研究了靶材中的化学配比 (掺杂比)对膜的透光率和电阻率的影响。结果表明 :掺杂比影响着膜的电学、光学性能和膜的结晶状况。掺杂比从 0.75 %增至 1.5 % ,膜的载流子浓度、透光率 (波长大于 500 nm)和光隙能相应增大。在掺杂比为 1.5 %左右时沉积的膜的电阻率达到最小 ,其值为7.1×10-4 Ωcm ,且在可见光区其透光率超过了 90 %。

     

    Abstract: In this paper, the effects of dopant ratio on the resistivity and optical transmittance of ZnO:Al films deposited by pulsed laser deposition have been investigated. The properties of the films have been analysed through Hall effect and X-ray diffraction. From electrical and optical analysis the carrier concentration ,optical transmittance and optical energy gap increased when the dopant ratio is raised from 0.75%to 1.5%. The film prepared at 300℃ using a target of dopant ratio of 1.5%has a minimum resistivity of 7.1×10 -4 Ωcm,and a transmittance of about 90%in the range of visible light.

     

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