Abstract: Micro-Electro-Mechanical Systems and Virtal Reality are both emerging technologies, it’s very meaningful to couple them with each other and set up a Virtual Reality System for MEMS. In this paper, we summarize the hardware architectures and software tools, VR “toolkits”, of Virtual Reality System, firstly. Then the hardware architecture and software development environment for VEMEMS are proposed; finally, the implemental strategy is presented.