Abstract: Lead zirconate titanate（PZT）films with different compositions and pyrolysis temperature were fabricated on Pt（111）/Ti/SiO₂/Si using sol-gel method.The effects of compositions and pyrolysis temperature on the microstructure,preferential orientation and electrical properties of PZT films were investigated.The SEM photographs reveal that all the PZT films are well-crystallized and have dense and uniform microstructure without any cracks.The XRD analysis indicates that the preferential orientation is not only sensitive to the pyrolysis temperature,but also to the compositions.The PZT（Zr:Ti = 30/70）pyrolyzed at 300℃ presents a high remanent polarization of 17.32μC/cm² and coercive field of 23.3kV/cm.For the PZT films with different compositions,PZT（53/47）shows the highest remanent polarization,dielectric constant and resistivity.