Abstract: This paper describes the fabrication process of a planar coil using photosensitive polyimde and high adhesive polyimide by twice etching method. This fabrication process is simple and can improve the output current of micro-motor for the rudimental polyimides as insulating layer. The as-fabricated micro-motor can directly drive a micro-gear with the diameter of 3.5nm. Its rotative speed can be controlled and can be reversible in direction. This micro-motor driven has successfully driven a prism with more weight and volume than itself.