Abstract: Lanthanum nickel oxide （LaNiO₃ or LNO） conducting thin films that could be used as electrodes for improving fatigue and aging properties of ferroelectric thin films were investigated. LNO thin films were directly spin-coated onto Si （100） substrates followed by rapid thermal annealing （RTA） in air and in oxygen, LNO thin films can be crystallized at lower annealing temperature of 550℃, and with the increase in thermal annealing temperature, the LNO thin film owns the lowest electrical resistivity at 750℃. The effects of annealing temperatures and oxygen vacancies on the structure and electrical pro-perties of the films were examined by XRD and four probe measurements, respectively. It is found that with the increase in thermal annealing temperature, the LNO thin film displays a structure transformation above 860℃. Pre-heat treatment temperature and time play a key role to determine the grain size of LNO films. The grain size of LNO film is bigger with shorter pre- heat treatment time and longer annealing time, the film owns a better electrical property. In addition, the relationship between the measured temperature and electrical properties of LNO films is also discussed.