Abstract:
The GMR sensors array based on the GMR multilayers were fabricated by photolithography,ion beam etching and lift-off technology as well as protected by SiO
2.This sensor array could be used to detect multiple biomarkers simultaneously.We also investigate the immobilization and detection of protein by the sensors.After the SiO
2 surface was processed by O
2 plasma and PEI,Human IgG were immobilized on the surface to capture the target antigen——Biotin-labeled Donkey Anti-Human IgG..After the capture,the 300nm magnetic beads(streptavidin labeled) were immobilized on the surface of GMR sensors based on biotin-streptavidin reaction.The variations of resistance of GMR sensors caused by the magnetic beads were detected when a vertical magnetic field of 230 Oe was applied.In this experiment,five kinds of concentration of Donkey Anti-Human IgG were detected,which cause GMR resistance change of 4-164mΩ.A semi-logarithmic relationship is found between them.This kind of array-type GMR chip can be used to quantify certain kind or several kinds of protein in samples simultaneously,which is expected to be used in clinical diagnosis in future.