类金刚石薄膜作为阴极阵列的场发射显示器研制

Fabrication of field emission display using diamond-like-carbon thin film as cathode array

  • 摘要: 采用真空磁过滤弧沉积(FAD)的方法制备的类金刚石(DLC)薄膜具有良好的场发射性能。通过离子束技术和微细加工技术可以实现DLC薄膜的图形化并能大大提高薄膜的场发射性能。测试表明,DLC薄膜孔洞阵列具有很好的电子场发射性能,阈值电场达到了2.1V/μm,当场强为14.3V/μm时,电流密度达到了1.23mA/cm2。利用图形化的DLC薄膜作为阴极,设计和制作了矩阵选址单色场发射显示器(FED)样管。

     

    Abstract: Diamond-like-carbon(DLC)thin film was prepared by filtered arc deposition(FAD)with a good electron emission performance. A patterned DLC thin film cathode was fabricated by reactive-ion etching method and micro-fabrication technology. The electron emission performance of the patterned DLC thin film cathode is much better than the unpatterned ones. Field emission from DLC hole array was studied. Threshold field is as low as 2.1V/μm. At an electric field of 14.3V/μm, an emission current density as large as 1.23mA/cm2 is achieved. On the base of fabrication of the patterned DLC thin film cathode,a kind of matrix-addressed diode FED prototype is designed and packaged.

     

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