Abstract: Surfaces topographies on Si wafer substrates with different dimesions have been produced by photolithography and reactive ion etching（RIE）,and subsequently titanium dioxide films were coated on them via sol-gel method.The coated TiO₂ films with the same roughness have an anatase-typed nano-structured,and they are compact and homogeneous.The adhesion behavior of human umbilical vein endothelial cells（HUVEC） on the photograhpied-TiO₂ films were investigated by means of scanning electron microscopy（SEM） and fluorescent staining.It is found that the differences of cell adhesion behavior on sample surfaces are predominantly attribute to the dimesions of the topographies because the chemical composition,cytotoxicity,surface roughness of the surfaces are quite similar.It seems that the cells exhit a better adhesion state on the sufaces on which larger flat-area is applied for the cells to stretch themselves.