N扩散对熔液法生长GaN晶体外延速率的影响

The influence of N diffusion on the growth rate of GaN by Na-flux method

  • 摘要: 使用钠熔液液相外延在GaN/蓝宝石衬底上生长出GaN晶体;研究晶体生长速度与生长压力的关系,使用DCXRD对样品进行表征,发现在氮气压力为3.8MPa,温度为800℃的条件下,外延速度较快且结晶质量较高;研究还发现GaN晶体外延层的生长速率不但与溶液中N的输运有关,还与熔液中N的浓度有关。

     

    Abstract: GaN single crystals were prepared by Na-flux LPE method on the GaN/Sapphire substrates,the influence of pressure on the GaN crystal growth speed was explored,the samples were characterized by DCXRD,it was found that under the conditions of the N2 pressure of 3.8MPa and the temporature of 800 ℃,the epitaxial layer showed well crystalline quality and higher growth speed.The study also found that the growth rate of the GaN epitaxial layer is not only concerned with the N transport in the solution,but also with the concentration of N in the melt.

     

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