全自动在片直流测试技术对提高GaAs MMIC批量生产成品率的作用

Application of automatic on-wafer DC test for increasing yield on GaAs MMIC large volume production

摘要: 成品率高低是批量生产能否进行的关键。采用全自动在片直流测试, 对参数进行统计分析, 能判断成品率是否正常, 并帮助找出影响成品率的原因。本文介绍了行之有效的测试统计和分析技术。

Abstract: High yield is a very important prerequisite in batch process. Using automatic on wafer DC parameter test technique and analysing statistical results of measured parameters, the process reason of low yield can be found.