Abstract: The fabrication of the micro dispensing array chips was successfully completed by Polymer-MEMS technology,employing three SU-8 layers without development after exposure until the end of the process.The influences of process parameters such as evenness,temperature and exposure doses on multilayer microstructures,were discussed in order to eliminate the crack,breakage and over-crosslink in the chip.The processes of fluid sample filling,delivering and dispensing can be automatically performed in the chip by capillary force of the hydrophilic micro-channel pre-treated by O₂ plasma.Up to 25 individual fluid spots with the average diameters of 384μm can be simultaneously produced onto nylon membrane with the area of 3.4mm×3.4mm by the chip at a pressure of 10 kPa for 10ms and the coefficient of variation（CV） within 25 spots is 2.6%. The CV for signal intensity within all spots in a single DNA microarray fabricated by the chip is as low as 4.5% and the CV for diameter can reach 3.2%.It shows that the chip is suitable and practicable for microarray production and assay.