放电等离子烧结技术制备复合梯度靶材的研究

Preparation of composite graded target by spark plasma sintering

  • 摘要: 采用放电等离子烧结技术制备了TbFeCo/Ti和Bi2O3/Cu复合梯度靶材,利用扫描电子显微镜和能谱分析仪对材料的微观组织形貌及成分进行了分析。结果表明,合成的复合梯度靶材具有宏观组织不均匀性和微观组织连续性的特征,显微组织中不存在微裂纹。与单一靶材相比,TbFeCo/Ti复合梯度靶材解决了在制造和使用过程中容易碎裂的问题,Bi2O3/Cu复合梯度靶材解决了在溅射过程中的散热问题。

     

    Abstract: Composite graded TbFeCo/Ti and Bi2O3/Cu target materials were produced by spark plasmasintering technique. Microstructure and composition of the materials were investigated by means of scanning electron microscope with energy dispersive X-ray spectrometer. It is found that the target materials exhibit the micro-structural characteristics of macroscopic inhomogeneity and microscopic continuity, and there are no fine cracks in the interface. Compared with single composition target, thecomposite graded TbFeCo/Ti target and composite graded Bi2O3Cu target improve the toughness and thermal conductance, respectively.

     

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