电磁驱动微机械陀螺接口电路的研究
Research of Interface Circuit of Mems Gyro Driving by Electromagnetic Force
-
摘要: 电磁驱动电容检测的力平衡微机械陀螺相对于压阻检测等方式的其他形式的微机械陀螺来说,具有高灵敏度及高精度的突出优点,但是其接口电路也比较复杂。这一接口电路从功能上可分为驱动电路和检测电路两个部分:驱动电路的主要功能是使微机械陀螺产生在驱动模态固有频率下的振幅稳定的正弦振动;检测电路的主要功能是拾取陀螺所产生的角速度信号。为了提高陀螺的工作带宽和线性度,检测电路采用了力平衡方式。本文从微机械陀螺接口电路的工作原理、传输函数和稳定性等方面分析了这种形式的微机械陀螺的接口电路。并介绍了接口电路中用到的几种主要器件。Abstract: The force-balanced gyro which driving by electromagnetic force, and detecting by capacitance has prominent advantages of higher sensitivity and higher precision than other Mems gyros.But its interface circuit is comparative complex.Its interface circuit includes two parts, which are driving circuit and detecting circuit.The main function of driving circuit is producing a stable sinusoidal vibration under its natural frequency of driving modal for the gyro.The function of detecting circuit is pick up the angular velocity signal created by the gyro.We have adopted force-balanced system to increase the working band-width and linearity of the gyro.Here we analyzed the principle of transfer-function and stability of this Memms gyro.We have also introduced several main devices which had been used in this interface circuit.
下载: