Abstract: A brief introduction of the self-heating effect of SOI material and the thermal analysis on it are presented.The concept of self-heating and the effects which cause,degradation of the drain current and formation of negative differential transconductance are described.Some new structures of SOI have been studied,such as SOIM,silicon-on-AlN,GPSOI,SiCOI,GeSiO I,SON,SSOI ,all of which can alleviate the effects caused by self-heating.