Abstract: Thin film technologies are widely used in modern scientific and technological fields. Thin film growth has been studied deeply and computer simulation is a useful method in the studies. In this article, some experimental results and corresponding theoretical analyses of thin film growth are summarized. Computer simulation methods including Monte Carlo Methods, Molecular Dynamics and some models of describing the movements of the particles reached the substrate are mainly discussed here. Some important factors such as the interactions between particles, dynamic power of incidence particles and the diffusion of the particles on substrate, which should been considered in computer simulation are also discussed.