Abstract: The key fabrication techniques of measuring and controlling thickness without removing the phaltoresist, and internal stress in the two-gimbals micromachined gyroscope which have great iafluence on the characteristics of the two-gimbals micromachined gyroscope were investigated. Based on that,the gyroscope structure was fabricated using the self-aligned quasi-LIGA technologies developed in our laboratory. The dimension of active area and thickness of structure layer is 1.0 ×1.0mm² and 4μm, respectively. The vibration of the inner and outer gimbals in air was observed by applying electrical signal.