Abstract: The vacuum obtains and maintenance is still still the main problem in the field of MEMS vacuum packaging technology.In this paper a novel getter,we call it nanogetter,based on carbon nanotubes（CNTs） with large surface area ratio and native gas adsorption is prepared to fabricate a novel getter,which is capable of getting active at high vacuum environment（＜10^-3 Torr,molecular state） and low temperature（＜400℃）.The pumping speed of unit-weight nanogetters is up to 1000 times greater than St175 at room temperature after activation at 500℃×10min,and nearly 20 times as large as St175 at 400℃ after activation at 750℃×10min.