Abstract:
The ZnO thin film is the earliest discovered with fine gas sensing characteristics and is the earliest put forward to develop gas sensor basic material.However,it has not come true in the recent half century.Recently,we have solved the doping impurity stability by powder sputtering,and solved the structure stability by selecting proper substrate(Al
2O
3)and sputtered parameters,such that a kind with doping impurity stability,structure stability,better gas sensing characters yielded.We can acquire microminiature pensile gas sensor by double point welding the chip and wiring pole,and make out the alarm which can detect alcohol gas concentration between 100ppm and 500ppm.