Abstract:
Micromechanical systems must be assembled where monolithic integration is not feasible because of incompatible processes, complex geometries, or different materials involved. This paper comments on three assembly techniques developed for micromechanics, i. e., assembly techniques using suction glass needle, microclamp, and multipurpose micromanipulator modeling man hand. Based on the analysis of these assembly techniques, the authors point out that assembly technique combining suction glass needle and microclamp can meet the requirements of current micromechanical system assembly, and it is a cost-effective way.