Abstract: The effects of the eigenfrequency and damping of a silicon micromachined accelerometer on the shock test were investigated. Low eigenfrequency and light damping will lead to the presence of ringing in the shock test, which disturbs the real response of the shock. Shock experiments up to 20000g were conducted for the accelerometer with high eigenfrequency and appropriate damping ratio, no ringing is found. The ringing happens whereas the accelerometer is nearly undamped. The structure of the accelerometer used in the shock experiments,with small size and high natural frequency,can cover various acceleration ranges from 2000g to 200,000g depending on the thickness of the plate and the beams.