喷射沉积硅铝电子封装材料的组织与性能
Microstructures and properties of Si-Al alloy for electronic packaging prepared by spray deposition technique
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摘要: 采用喷射沉积技术制备了电子封装材料70%Si-A l合金板材,制备的合金具有细小均匀的组织结构,各向同性,Si相粒子分布弥散。分析表明合金具有和半导体材料接近的热膨胀系数(7×10-6~8×10-6/℃)、优良的导热性能(>100W/m.K),实验表明合金具有较好的机械加工性能,可以用普通的刀具进行加工,初步研究了热等静压在合金制备中的应用。Abstract: An electronic package material,silicon-aluminum alloy (70%Si-Al) strip was developed by using spray deposition technique.The high-silicon alloy prepared has fine,isotropic microstructures with fine Si phase particles dispersing in Al matrix uniformly.Investigations show that the 70% Si-Al alloy has low constant of thermal linear expansion(7×10-6-8×10-6/℃) and excellent properties of heat conductivity(>100W/m·K).It is also shown that the alloy has good machinability.It can be readily processed by conventional carbon tools.Hot isostatic pressing(HIP) is used for compacting the as-deposited alloys.
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