Abstract: In order to study the influence of thermal and electrical properties of phase change material and heater on heating efficiency and power consumption,a finite element analytical model was established.It is demonstrated by the simulation that a more accurate simulation can be done if introducing the temperature dependent thermal conductivity of phase change layer,and that heating efficiency is improved when increasing the resistivity of heater and phase change layer,and that the resistivity of heater should be lower than the resistivity of PCL in order to concentrate the heating efficiency in the phase change layer.In respect to the application of phase change memory with lower power consumption,those phase change materials that with relatively higher resistivity such as Si₂Sb₂Te₅ are more competent than the traditional Ge₂Sb₂Te₅,and for the heater material that can reduce power consumption,TiN is better than TiW,W and Ti.