Al/TiO2异质结对TiO2薄膜阻变行为的影响

Effect of Al/TiO2 Heterojunction on the Resistive Switching Behavior of TiO2 Thin Films

  • 摘要: 采用溶胶凝胶法和旋涂工艺在FTO导电玻璃表面制备了TiO2薄膜,通过在TiO2薄膜表面蒸镀Al电极构建了Al/TiO2/FTO结构的阻变器件。通过AFM、XRD和拉曼光谱分别研究了TiO2薄膜的表面形貌、晶相组成和晶体结构。结果表明,TiO2薄膜表面平整,晶相结构为锐钛矿结构,I-V测试表明Al/TiO2/FTO阻变器件表现出无初始化过程的双极性阻变特性。通过与无Al电极的W(探针)/TiO2/FTO阻变器件进行对比,得到了基于Al/TiO2界面效应控制的阻变过程和电流传输机制。研究结果表明Al/TiO2/FTO器件在低阻态下正偏压区间为Pool-Frenkel传导机制,负偏压区间为欧姆导电机制和肖特基发射;在高阻态下则满足陷阱控制的空间电荷限制电流传导机制。W/TiO2/FTO阻变器件分别是高阻态为缺陷控制的空间电荷限制电流导电机制,低阻态为欧姆导电机制。

     

    Abstract: The anatase TiO2 thin films were coated on FTO conductive glass by spin coating technique,and a resistive switching memory with Al/TiO2/FTO structure was constructed. The surface morphology,phase composition and crystal structure of TiO2 thin films and the properties of Al/TiO2/FTO devices were studied by AFM,XRD,Raman spectroscopy and I-V measurements. Al/TiO2/FTO devices exhibit bipolar resistive switching characteristics without electroforming process. In addition,by comparing with W (probe)/TiO2/FTO devices without Al electrodes,the resistive switching process and various current transfer mechanisms controlled by Al/titanium dioxide interface effect are obtained. The results show that the positive bias region Al/TiO2/FTO devices is Pool-Frenkel conduction mechanism,the negative bias region is ohmic conduction mechanism in the low resistance state,and the trap-controlled space chargelimited current conduction mechanism is satisfied in the high resistance state.

     

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