基于AFM力曲线的纳米梁厚度的非破坏测量方法
Nondestructive measurement of nanobeam thickness based on AFM force curve
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摘要: 本文阐述了基于原子力显微镜(AFM)的弯曲测试测量纳米梁厚度的理论和方法,并界定了基于AFM的厚度测量方法的适用条件,对基于AFM的厚度测量的两个典型应用进行了介绍。对硅纳米梁进行了厚度测量,并进行了重复性实验,梁的平均测量度为160.36nm。Abstract: The theory and method of bending test on silicon nanobeam for the thickness measurement based on atomic force microscope（AFM） are introduced.The applicability of the thickness measurement method is strictly defined.A typical application of the thickness measurement based on AFM is presented.Repeated measurement of the thickness of silicon nanobeam is made,and the average thickness is 160.36nm.
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