Abstract: Si-based materials are promising alternative anode materials to graphitic carbons for lithium ion batteries（LIBs） due to their high theoretical specific capacity and low potential for lithium insertion.However,the commercialization of Si-based materials has been hindered by the large initial irreversible capacity and poor cycle life.Preparing Si-based thin film materials is an effective way to improve the cycling performance.This article has discussed the change of the crystal structure and surface morphology of the Si thin-film anode during Li insertion and extraction as well as capacity fading.And it summarizes the research progress of Si-based thin films prepared by magnetron sputtering as anode materials for LIBs.Additionally,the future research and development of the Si-based thin films is also presented.