Abstract: Considering micro-forming characters,a special microforming apparatus was developed using a PZT as actuator,and a large load was obtained within a small displacement.With the apparatus,micro-forming processes of micro-parts were carried out.The analysis of forming quality was performed.The fact that the formed micro-gear owns smooth tooth surface shows that the surface quality is good.The flow lines are according to the contour of micro-gear, which is useful to improve compositive mechanism capability.The deep-drawn processes of micro-cup were investigated with 3003 Al alloy foil,and the effects of forming parameters were analyzed.A micro-cup of 1mm in external diameter was drawn successfully.The results shown above indicate that micro-forming process is suitable for the massive production of high quality micro-parts.