高掺杂Si/BDD薄膜电极的制备及电化学性能

Fabrication and Electrochemical Properties of High Doped-Si/BDD Thin-Film Electrode

  • 摘要: 近年来,掺硼金刚石(BDD)膜因具备独特的优异性能而作为电极材料已经受到很大的关注。本文通过MPCVD法在高掺杂硅衬底上生长掺硼金刚石膜,并用四探针、扫描电镜、激光拉曼和电化学工作站对其进行了检测,发现所制备的掺硼金刚石膜电导率达10-2Ω·cm,同时发现金刚石膜质量因硼原子的掺入而有所下降,采用循环伏安法研究其电化学性质。结果表明,与Pt电极相比(1.8V和-1×10-3~3×10-4A),BDD电极具有很宽的电化学窗口(2.8~3.2V),较低的背景电流(-3×10-6~2×10-6A);选用高掺杂的硅作基底使导线从导电基底接入,能够为Si/BDD电极提供更多工作面积从而节约制备成本;在铁氰化钾电解液中,表面所进行的电化学反应具有较好的准可逆性,并且电极表面具有较好的稳定性。对有机物苯酚的催化氧化检测发现:与Pt电极相比,BDD电极氧化能力强,且氧化产物简单彻底,因此可以作为一种理想的电极材料。

     

    Abstract: Boron-doped diamond(BDD) thin film is a new electrode material that has received great attention recently owe to its possessing unique characteristics.Boron-doped diamond film on the heavily doped silicon substrate was prepared by the microwave plasma chemical vapor deposition.The electrochemical properties of BDD were characterized by resistivity measurement by 4-point probe method, SEM, Raman spectroscopy and electrochemistry working station.The resistivity of diamond films is 10-2Ω·cm, Meanwhile, the quality of the diamond film was deteriorated with the increasing of boron doped.The electrochemical properties of the electrode were investigated using cyclic voltammetry, The results showed that Si/BDD electrode had a very wide potential window(2.8~3.2V)and very low background current(-3×10-6~2×10-6A), comparing with Pt electrode(1.8V and-1×10-3~3×10-4A);and as electrode leader for BDD was jointed to the conducting substrate(high doped-Si), more work area and lower cost of BDD could get.In electrolyte including Ferri/Ferrocyanide, the electrochemical reaction was carried out on the surface with good quasi-reversibility and excellent chemical stability.Studies of the oxidation of organic compounds showed that, comparing with Pt electrode, the diamond electrode could oxidate phenol, and the process of oxidation was very simple and complete.

     

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